A measurement of Young s modulus and residual stress in MEMS bridges using a surface profiler

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2003-09, Vol.13 (5), p.686-692
Main Author: Denhoff, M W
Format: Article
Language:English
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/13/5/321