Piezoelectric AlGaAs bimorph microactuators

Piezoelectric bimorph cantilever microactuators based on single-crystal Al0.3Ga0.7As are demonstrated. Fabricated devices are characterized for their quasistatic and resonant behavior when driven in both unimorph and bimorph configurations. Quasistatic actuator behavior is compared with a simple ana...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2006-05, Vol.16 (5), p.1062-1066
Main Authors: Li, L, Kumar, P, Kanakraju, S, DeVoe, D L
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical engineering. Machine design
Mechanical instruments, equipment and techniques
Microelectronic fabrication (materials and surfaces technology)
Micromechanical devices and systems
Physics
Precision engineering, watch making
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Transducers
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Summary:Piezoelectric bimorph cantilever microactuators based on single-crystal Al0.3Ga0.7As are demonstrated. Fabricated devices are characterized for their quasistatic and resonant behavior when driven in both unimorph and bimorph configurations. Quasistatic actuator behavior is compared with a simple analytic model. Measured unimorph and bimorph tip deflections match well with the model, with deviations resulting from imperfections in device geometry and electrical resistivity of the electrodes. The effects of bimorph actuation on linearity and structural damping at resonance are also evaluated.
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/16/5/026