A complete three-dimensional sound intensity sensor integrated on a single chip

• Published in: Journal of micromechanics and microengineering 2008-11, Vol.18 (11), p.115004-115004 (9)
• Main Authors: Yntema, D R, Honschoten, J W van, Wiegerink, R J, Elwenspoek, M
• Format: Article
• Language: English
• Subjects: Applied sciences; Electronics; Exact sciences and technology; Fluid dynamics; Fundamental areas of phenomenology (including applications); Instrumentation for fluid dynamics; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Mechanical engineering. Machine design; Mechanical instruments, equipment and techniques; Microelectronic fabrication (materials and surfaces technology); Micromechanical devices and systems; Physics; Precision engineering, watch making; Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/18/11/115004

Complete characterization of a sound field requires measurement of both sound pressure and particle velocity. In this paper, we present a three-dimensional acoustic particle velocity sensor chip. Furthermore, a sound pressure sensor was integrated on the same chip, enabling three-dimensional sound intensity measurements. The integration of multiple sensors on a single silicon chip results in highly reproducible sensors and a very small sensor-to-sensor distance allowing for accurate single-point measurements. The latter is demonstrated by measurement of the 3D particle velocity field of a very small (1 X 1 mm2) sound source.