Design and development of a 3D scanning MEMS OCT probe using a novel SiOB package assembly

• Published in: Journal of micromechanics and microengineering 2008-12, Vol.18 (12), p.125005-125005 (8)
• Main Authors: Xu, Y, Singh, J, Premachandran, C S, Khairyanto, A, Chen, K W S, Chen, N, Sheppard, C J R, Olivo, M
• Format: Article
• Language: English
• Subjects: Applied sciences; Circuit properties; Electric, optical and optoelectronic circuits; Electronics; Exact sciences and technology; Instruments, apparatus, components and techniques common to several branches of physics and astronomy; Integrated optics. Optical fibers and wave guides; Integrated optoelectronics. Optoelectronic circuits; Interferometers; Mechanical instruments, equipment and techniques; Micromechanical devices and systems; Optical and optoelectronic circuits; Optical instruments, equipment and techniques; Physics
• ISSN: 0960-1317; 1361-6439
• DOI: 10.1088/0960-1317/18/12/125005

A MEMS optical coherence tomography (OCT) probe prototype was developed using a unique assembly based on silicon optical bench (SiOB) methodology. The probe is formed by integrating a three-dimensional (3D) scanning micromirror, gradient refractive index (GRIN) lens and optical fiber on SiOB substrates having prefabricated self-aligned slots. The two-axis scanning micromirror is based on electrothermal actuation with required voltage less than 2 V for mechanical deflections up to 17 deg. The optical probe was enclosed within a biocompatible, transparent and waterproof polycarbonate tube with a view of in vivo diagnostic applications. The diameter of the miniature probe is less than 4 mm and the length of its rigid part is about 25 mm. The probe engineering and proof of concept of the probe were demonstrated by obtaining en face and three-dimensional OCT images of an IR card used as a standard sample.