Diffractive microlens with a cascade focal plane fabricated by single mask UV-photolithography and common KOH:H 2 O etching

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2010-10, Vol.20 (10), p.105029
Main Authors: Zhang, Xinyu, Li, Hui, Liu, Kan, Luo, Jun, Xie, Changsheng, Ji, An, Zhang, Tianxu
Format: Article
Language:English
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ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/20/10/105029