Porous silicon as a sacrificial material

Saved in:
Bibliographic Details
Published in:Journal of micromechanics and microengineering 1996-12, Vol.6 (4), p.361-369
Main Authors: Bell, T E, Gennissen, P T J, DeMunter, D, Kuhl, M
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:
ISSN:0960-1317
1361-6439
DOI:10.1088/0960-1317/6/4/002