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The effects on plasma properties of a current node on inductively coupled plasma sources

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Bibliographic Details
Published in:	Plasma sources science & technology 2003-08, Vol.12 (3), p.432-442
Main Authors:	Srinivasan, S, Marquis, J, Pratti, L, Khater, M H, Goeckner, M J, Overzet, L J
Format:	Article
Language:	English
Subjects:	Discharges for spectral sources (including inductively coupled plasma) Discharges for spectral sources (including inductively coupled plasmas) Electric and magnetic measurements Electric discharges Exact sciences and technology Physics Physics of gases, plasmas and electric discharges Physics of plasmas and electric discharges Plasma diagnostic techniques and instrumentation
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