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Determination of gas temperature and thermometric species in inductively coupled plasmas by emission and diode laser absorption

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Bibliographic Details
Published in:Plasma sources science & technology 2004-11, Vol.13 (4), p.691-700
Main Authors: Bol'shakov, Alexander A, Cruden, Brett A, Sharma, Surendra P
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/13/4/019