Hairpin resonator probe measurements in RF plasmas

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Bibliographic Details
Published in:Plasma sources science & technology 2005-11, Vol.14 (4), p.734-743
Main Authors: Piejak, R B, Al-Kuzee, J, Braithwaite, N St J
Format: Article
Language:English
Subjects:
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
Plasma diagnostic techniques and instrumentation
Radio-frequency and microwave measurements
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/14/4/012