Spatially resolved atomic excitation temperatures in CH 4 /H 2 and C 3 H 8 /H 2 RF discharges by optical emission spectroscopy

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Bibliographic Details
Published in:Plasma sources science & technology 2007-08, Vol.16 (3), p.434-440
Main Authors: Chingsungnoen, A, Wilson, J I B, Amornkitbamrung, V, Thomas, C, Burinprakhon, T
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/16/3/002