Two-dimensional modelling of - radio-frequency discharges for a-Si:H deposition

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Bibliographic Details
Published in:Plasma sources science & technology 1998-08, Vol.7 (3), p.348-358
Main Authors: Leroy, Olivier, Gousset, Gérard, Alves, Luís Lemos, Perrin, Jérôme, Jolly, Jacques
Format: Article
Language:English
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ISSN:0963-0252
1361-6595
DOI:10.1088/0963-0252/7/3/013