Influence of the deposition parameters on the transition region of hydrogenated silicon films growth

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Bibliographic Details
Published in:Chinese physics (Beijing, China) China), 2005-11, Vol.14 (11), p.2342-2347
Main Authors: Qing-Song, Lei, Zhi-Meng, Wu, Xin-Hua, Geng, Ying, Zhao, Jian-Ping, Xi
Format: Article
Language:English
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ISSN:1009-1963
1741-4199
DOI:10.1088/1009-1963/14/11/034