Fabrication of high-aspect-ratio microgrooves using an electrochemical discharge micromilling process

In this study, we created high-aspect-ratio microgrooves in hard, brittle materials using an electrochemical discharge machining (ECDM) process by introducing microtextured machining tool. To enhance the electrical discharge activity, the morphology of the tool side surface was treated via micro-ele...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2017-05, Vol.27 (5), p.55004
Main Authors: Han, Min-Seop, Chae, Ki Woon, Min, Byung-Kwon
Format: Article
Language:English
Subjects:
ECDM
glass machining
microfabrication
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Summary:In this study, we created high-aspect-ratio microgrooves in hard, brittle materials using an electrochemical discharge machining (ECDM) process by introducing microtextured machining tool. To enhance the electrical discharge activity, the morphology of the tool side surface was treated via micro-electrical discharge machining to produce fine microprotrusive patterns. The resulting microtextured surface morphology enhanced the electric field and played a key role in improving the step milling depth in the ECDM process. Using the FEM analysis, the evaluation of the field enhancement factor is also addressed. Our experimental investigation revealed microgrooves having an aspect ratio of 1:4, with high geometric accuracy and crack-free surfaces, using one-step ECDM.
ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/aa64b9