Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling

The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliab...

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2017-09, Vol.27 (9), p.95015
Main Authors: Fishlock, S J, O'Shea, S J, McBride, J W, Chong, H M H, Pu, S H
Format: Article
Language:English
Subjects:
buckling
MEMS resonator
nanocrystalline graphite
nanographite
PECVD
simulation
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Summary:The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5-640 kHz and quality factor above 1819 in vacuum obtained.
ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/aa7ebb