Fabrication method of quartz glass ring resonator using sacrificial support structure

In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant freque...

Full description

Saved in:
Bibliographic Details
Published in:Journal of micromechanics and microengineering 2020-11, Vol.30 (11), p.115018
Main Authors: Jehanzeb Khan, Muhammad, Tsukamoto, Takashiro, Tanaka, Shuji
Format: Article
Language:English
Subjects:
MEMS gyroscope
quartz glass resonator
ring resonator
sacrificial supporting structure
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by
cites cdi_FETCH-LOGICAL-c266t-da11c1e0c951a5ec1506e995c645d349b20eaeb221c8841562ea3546bcc47ec3
container_end_page
container_issue 11
container_start_page 115018
container_title Journal of micromechanics and microengineering
container_volume 30
creator Jehanzeb Khan, Muhammad
Tsukamoto, Takashiro
Tanaka, Shuji
description In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.
doi_str_mv 10.1088/1361-6439/abb753
format article
fullrecord <record><control><sourceid>iop_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1088_1361_6439_abb753</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>jmmabb753</sourcerecordid><originalsourceid>FETCH-LOGICAL-c266t-da11c1e0c951a5ec1506e995c645d349b20eaeb221c8841562ea3546bcc47ec3</originalsourceid><addsrcrecordid>eNp9kMFLwzAUh4MoOKd3jzl6sC6vabL0KMNNYeBlnkOapjNjbepLetC_3paJJxEePN7j9z0eHyG3wB6AKbUALiGTBS8XpqqWgp-R2e_qnMxYKVkGHJaX5CrGA2MACtSMvK1Nhd6a5ENHW5feQ01DQz8Gg-mL7o8mRoq-21N0MXQmBaRDnOZoLPrGW2-ONA59HzDRmHCwaUB3TS4ac4zu5qfPyW79tFs9Z9vXzcvqcZvZXMqU1QbAgmO2FGCEsyCYdGUprCxEzYuyypkzrspzsEoVIGTuDBeFrKwtls7yOWGnsxZDjOga3aNvDX5qYHqyoicFelKgT1ZG5P6E-NDrQxiwG__7L373R_zQtpqPCIwlGCjd1w3_Bl_Icr8</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Fabrication method of quartz glass ring resonator using sacrificial support structure</title><source>Institute of Physics</source><creator>Jehanzeb Khan, Muhammad ; Tsukamoto, Takashiro ; Tanaka, Shuji</creator><creatorcontrib>Jehanzeb Khan, Muhammad ; Tsukamoto, Takashiro ; Tanaka, Shuji</creatorcontrib><description>In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.</description><identifier>ISSN: 0960-1317</identifier><identifier>EISSN: 1361-6439</identifier><identifier>DOI: 10.1088/1361-6439/abb753</identifier><identifier>CODEN: JMMIEZ</identifier><language>eng</language><publisher>IOP Publishing</publisher><subject>MEMS gyroscope ; quartz glass resonator ; ring resonator ; sacrificial supporting structure</subject><ispartof>Journal of micromechanics and microengineering, 2020-11, Vol.30 (11), p.115018</ispartof><rights>2020 IOP Publishing Ltd</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c266t-da11c1e0c951a5ec1506e995c645d349b20eaeb221c8841562ea3546bcc47ec3</cites><orcidid>0000-0003-4083-0976 ; 0000-0002-7614-7717</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,780,784,27924,27925</link.rule.ids></links><search><creatorcontrib>Jehanzeb Khan, Muhammad</creatorcontrib><creatorcontrib>Tsukamoto, Takashiro</creatorcontrib><creatorcontrib>Tanaka, Shuji</creatorcontrib><title>Fabrication method of quartz glass ring resonator using sacrificial support structure</title><title>Journal of micromechanics and microengineering</title><addtitle>JMM</addtitle><addtitle>J. Micromech. Microeng</addtitle><description>In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.</description><subject>MEMS gyroscope</subject><subject>quartz glass resonator</subject><subject>ring resonator</subject><subject>sacrificial supporting structure</subject><issn>0960-1317</issn><issn>1361-6439</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><recordid>eNp9kMFLwzAUh4MoOKd3jzl6sC6vabL0KMNNYeBlnkOapjNjbepLetC_3paJJxEePN7j9z0eHyG3wB6AKbUALiGTBS8XpqqWgp-R2e_qnMxYKVkGHJaX5CrGA2MACtSMvK1Nhd6a5ENHW5feQ01DQz8Gg-mL7o8mRoq-21N0MXQmBaRDnOZoLPrGW2-ONA59HzDRmHCwaUB3TS4ac4zu5qfPyW79tFs9Z9vXzcvqcZvZXMqU1QbAgmO2FGCEsyCYdGUprCxEzYuyypkzrspzsEoVIGTuDBeFrKwtls7yOWGnsxZDjOga3aNvDX5qYHqyoicFelKgT1ZG5P6E-NDrQxiwG__7L373R_zQtpqPCIwlGCjd1w3_Bl_Icr8</recordid><startdate>202011</startdate><enddate>202011</enddate><creator>Jehanzeb Khan, Muhammad</creator><creator>Tsukamoto, Takashiro</creator><creator>Tanaka, Shuji</creator><general>IOP Publishing</general><scope>AAYXX</scope><scope>CITATION</scope><orcidid>https://orcid.org/0000-0003-4083-0976</orcidid><orcidid>https://orcid.org/0000-0002-7614-7717</orcidid></search><sort><creationdate>202011</creationdate><title>Fabrication method of quartz glass ring resonator using sacrificial support structure</title><author>Jehanzeb Khan, Muhammad ; Tsukamoto, Takashiro ; Tanaka, Shuji</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c266t-da11c1e0c951a5ec1506e995c645d349b20eaeb221c8841562ea3546bcc47ec3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2020</creationdate><topic>MEMS gyroscope</topic><topic>quartz glass resonator</topic><topic>ring resonator</topic><topic>sacrificial supporting structure</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Jehanzeb Khan, Muhammad</creatorcontrib><creatorcontrib>Tsukamoto, Takashiro</creatorcontrib><creatorcontrib>Tanaka, Shuji</creatorcontrib><collection>CrossRef</collection><jtitle>Journal of micromechanics and microengineering</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Jehanzeb Khan, Muhammad</au><au>Tsukamoto, Takashiro</au><au>Tanaka, Shuji</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Fabrication method of quartz glass ring resonator using sacrificial support structure</atitle><jtitle>Journal of micromechanics and microengineering</jtitle><stitle>JMM</stitle><addtitle>J. Micromech. Microeng</addtitle><date>2020-11</date><risdate>2020</risdate><volume>30</volume><issue>11</issue><spage>115018</spage><pages>115018-</pages><issn>0960-1317</issn><eissn>1361-6439</eissn><coden>JMMIEZ</coden><abstract>In this paper, a novel method to fabricate quartz glass electromagnetically actuated ring resonator for gyroscope application is presented. Sacrificial supporting structures were employed for the fabrication. The fabricated device was electromagnetically driven at resonance, with the resonant frequency of 42 KHz. The Q-factor at the atmospheric pressure was about 142. The frequency difference between primary and secondary mode was 681 Hz.</abstract><pub>IOP Publishing</pub><doi>10.1088/1361-6439/abb753</doi><tpages>10</tpages><orcidid>https://orcid.org/0000-0003-4083-0976</orcidid><orcidid>https://orcid.org/0000-0002-7614-7717</orcidid></addata></record>
fulltext fulltext
identifier ISSN: 0960-1317
ispartof Journal of micromechanics and microengineering, 2020-11, Vol.30 (11), p.115018
issn 0960-1317
1361-6439
language eng
recordid cdi_crossref_primary_10_1088_1361_6439_abb753
source Institute of Physics
subjects MEMS gyroscope
quartz glass resonator
ring resonator
sacrificial supporting structure
title Fabrication method of quartz glass ring resonator using sacrificial support structure
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-07T22%3A48%3A28IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-iop_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Fabrication%20method%20of%20quartz%20glass%20ring%20resonator%20using%20sacrificial%20support%20structure&rft.jtitle=Journal%20of%20micromechanics%20and%20microengineering&rft.au=Jehanzeb%20Khan,%20Muhammad&rft.date=2020-11&rft.volume=30&rft.issue=11&rft.spage=115018&rft.pages=115018-&rft.issn=0960-1317&rft.eissn=1361-6439&rft.coden=JMMIEZ&rft_id=info:doi/10.1088/1361-6439/abb753&rft_dat=%3Ciop_cross%3Ejmmabb753%3C/iop_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c266t-da11c1e0c951a5ec1506e995c645d349b20eaeb221c8841562ea3546bcc47ec3%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true