Silicon MEMS inertial sensors evolution over a quarter century

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Bibliographic Details
Published in:Journal of micromechanics and microengineering 2021-08, Vol.31 (8), p.84002
Main Authors: Langfelder, G, Bestetti, M, Gadola, M
Format: Article
Language:English
Subjects:
accelerometers
gyroscopes
MEMS
review
silicon
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ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/ac0fbf