Addendum: Multiaxial resonant MEMS force sensor (2018 J. Micromech. Microeng. 28 105002)

In this letter we present an MEMS Sensor to measure displacement in at least two directions. The sensor device is a resonant, Lorentz force driven and cross-shaped sensing structure whereas the measurement signal equals the change of the resonance frequency induced by the deformation of the sensor-f...

Full description

Saved in:
Bibliographic Details
Published in:Journal of micromechanics and microengineering 2022-04, Vol.32 (4), p.49401
Main Authors: Dabsch, Alexander, Rosenberg, Christoph, Klug, Patrick, Trimmel, Majesa, Keplinger, Franz
Format: Article
Language:English
Subjects:
displacement
lorentz force excited
MEMS
resonant sensor
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this letter we present an MEMS Sensor to measure displacement in at least two directions. The sensor device is a resonant, Lorentz force driven and cross-shaped sensing structure whereas the measurement signal equals the change of the resonance frequency induced by the deformation of the sensor-frame. This device is a pre-study to implement the sensor in a two-dimensional micro manipulation system for which the team uses a micro system analyzer to detect the resonance frequencies of the different vibration modes. The sensor-frame deformation between 0.1 and 2 µ m is generated by four piezo actuators. With this setup, the sensor achieves a sensitivity of up to 20 nm Hz −1 . The device is fabricated from a 100 mm SOI wafer with standard CMOS processes and has two Pt1000 elements integrated on the device layer to compensate any effects caused by thermal extension of the structure or temperature induced changes of material parameters.
ISSN:0960-1317
1361-6439
DOI:10.1088/1361-6439/ac56c8