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The role of composition and microstructure in Ni–W silicide formation and low temperature epitaxial NiSi 2 growth by premixing Si

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2017-02, Vol.50 (6), p.65303
Main Authors: Schrauwen, A, Van Stiphout, K, Demeulemeester, J, De Schutter, B, Devulder, W, Comrie, C M, Detavernier, C, Temst, K, Vantomme, A
Format: Article
Language:English
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ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/aa4ed7