Interface between Al 2 O 3 and 4H-SiC investigated by time-of-flight medium energy ion scattering

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Bibliographic Details
Published in:Journal of physics. D, Applied physics Applied physics, 2017-12, Vol.50 (49), p.495111
Main Authors: Linnarsson, M K, Hallén, A, Khartsev, S, Suvanam, S S, Usman, M
Format: Article
Language:English
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ISSN:0022-3727
1361-6463
DOI:10.1088/1361-6463/aa9431