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Binary Mn–Si nanostructures prepared by focused electron beam induced deposition from the precursor SiH 3 Mn(CO) 5
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Published in: | Journal of physics. D, Applied physics Applied physics, 2018-11, Vol.51 (45), p.455301 |
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Main Authors: | , , , , , , |
Format: | Article |
Language: | English |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0022-3727 1361-6463 |
DOI: | 10.1088/1361-6463/aae2d3 |