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Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke

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Bibliographic Details
Published in:	Journal of physics. D, Applied physics Applied physics, 2022-01, Vol.55 (3), p.35205
Main Authors:	Šlapanská, M, Kroker, M, Hnilica, J, Klein, P, Vašina, P
Format:	Article
Language:	English
Subjects:	excitation temperature floating potential HiPIMS magnetron sputtering optical emission spectroscopy probe spokes
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
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