A novel terahertz integrated sensor for liquid samples detections based on metamaterial and embedded microfluidic channels

• Published in: Journal of physics. D, Applied physics Applied physics, 2023-01, Vol.56 (2), p.25401
• Main Authors: Li, Xue, Jiao, Hengyuan, Zhu, Mingqiang, Deng, Tao, Sun, Jingye
• Format: Article
• Language: English
• Subjects: dipole resonances; Fano resonances; PDMS; split ring resonators; THz metamaterial microfluidic sensors
• ISSN: 0022-3727; 1361-6463
• DOI: 10.1088/1361-6463/ac9f53

THz metamaterial (MM) microfluidic sensors, which can be utilized for the detection of small volume liquid specimen, have attracted much attention in biosensing applications. In this paper, we propose a novel microfluidic channel embedded terahertz MM sensor, which employs split ring resonators (SRRs) and asymmetric two-gap SRRs for the detection of liquid samples. Unlike currently reported THz MM microfluidic sensors utilizing microfluidic superstrate-metal-substrate structure, our approach combines the microfluidic superstrate with substrate, by designing micro-channels underneath the gap of the SRRs within the polydimethylsiloxane substrate. It could be easily fabricated by standard photolithography techniques. The simulated results show that the performance of the sensor is dependent on the spacing angle between two gaps, the orientation of the gaps, as well as the polarization of electric fields. Furthermore, maximum Q factors of 9.5 and 44 are achieved for dipole resonance, with corresponding figure of merits of 0.63 and 2.89 RIU −1 for transmission and reflection scenarios. Thus, this concept and method not only provides sensitive biosensing for liquid-based samples, but also can be applied to other MM structures to further improve the sensitivity.