Corrigendum to 'Geometry distortions of nanostructure edges scanned with amplitude modulated atomic force microscopes'

In Hüser et al (2013 Meas. Sci. Technol. 24 115008), we have realized two errors in the calculations of the effect of damping in the vicinity of the surface. The error did not have a quantitatively visible impact on the geometric distortion, but is visible in the phase signal.

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Bibliographic Details
Published in:Measurement science & technology 2017-10, Vol.28 (10), p.109501
Main Authors: Hüser, Dorothee, Häßler-Grohne, Wolfgang, Hüser, Jonathan
Format: Article
Language:English
Subjects:
amplitude-modulated atomic force microscopy
cantilever response
dissipation
geometry distortion
high aspect ratio nanostructure
inverse problem
tip-sample interaction
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Online Access:Get full text
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Description
Summary:In Hüser et al (2013 Meas. Sci. Technol. 24 115008), we have realized two errors in the calculations of the effect of damping in the vicinity of the surface. The error did not have a quantitatively visible impact on the geometric distortion, but is visible in the phase signal.
ISSN:0957-0233
1361-6501
DOI:10.1088/1361-6501/aa7d8b