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Corrigendum to 'Geometry distortions of nanostructure edges scanned with amplitude modulated atomic force microscopes'
In Hüser et al (2013 Meas. Sci. Technol. 24 115008), we have realized two errors in the calculations of the effect of damping in the vicinity of the surface. The error did not have a quantitatively visible impact on the geometric distortion, but is visible in the phase signal.
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Published in: | Measurement science & technology 2017-10, Vol.28 (10), p.109501 |
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description | In Hüser et al (2013 Meas. Sci. Technol. 24 115008), we have realized two errors in the calculations of the effect of damping in the vicinity of the surface. The error did not have a quantitatively visible impact on the geometric distortion, but is visible in the phase signal. |
doi_str_mv | 10.1088/1361-6501/aa7d8b |
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subjects | amplitude-modulated atomic force microscopy cantilever response dissipation geometry distortion high aspect ratio nanostructure inverse problem tip-sample interaction |
title | Corrigendum to 'Geometry distortions of nanostructure edges scanned with amplitude modulated atomic force microscopes' |
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