Bringing real-time traceability to high-speed atomic force microscopy

In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently these instruments have been lacking full traceable metrology. In this paper traceable met...

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Bibliographic Details
Published in:Measurement science & technology 2020-07, Vol.31 (7), p.74005
Main Authors: Heaps, Edward, Yacoot, Andrew, Dongmo, Herve, Picco, Loren, Payton, Oliver D, Russell-Pavier, Freddie, Klapetek, Petr
Format: Article
Language:English
Subjects:
high-speed atomic force microscopy
metrology
nanometrology
nanotechnology
traceability
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Summary:In recent years, there has been growth in the development of high-speed AFMs, which offer the possibility of video rate scanning and long-range scanning over several hundred micrometres. However, until recently these instruments have been lacking full traceable metrology. In this paper traceable metrology, using optical interferometry, has been added to an open-loop contact-mode high-speed AFM to provide traceability both for short-range video rate images and large-area scans made using a combination of a high-speed dual-axis scanner and long-range positioning system. Using optical interferometry to determine stages' positions and cantilever displacement enables the direct formation of images, obviating the need for complex post-processing corrections to compensate for lateral stage error. The application of metrology increases the spatial accuracy and linearisation of the high-speed AFM measurements, enabling the generation of very large traceable composite images.
ISSN:0957-0233
1361-6501
DOI:10.1088/1361-6501/ab7ca9