Self-organization of random copolymers to nanopatterns by localized e-beam dosing

Strategic electron beam (e-beam) irradiation on the surface of an ultrathin (

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Bibliographic Details
Published in:Nanotechnology 2021-07, Vol.32 (28), p.285302
Main Authors: Pandey, Ankur, Maity, Surjendu, Murmu, Kaniska, Middya, Sagnik, Bandyopadhyay, Dipankar, Gooh Pattader, Partho Sarathi
Format: Article
Language:English
Subjects:
dewetting
electron beam lithography
patterning
random-co-polymer
tone reversal resist
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Summary:Strategic electron beam (e-beam) irradiation on the surface of an ultrathin (
ISSN:0957-4484
1361-6528
DOI:10.1088/1361-6528/abf197