Loading…

Layer-by-layer etching of LaAlSiO x

Saved in:

Bibliographic Details
Published in:	Plasma sources science & technology 2017-05, Vol.26 (6), p.65015
Main Authors:	Omura, Mitsuhiro, Furumoto, Kazuhito, Matsuda, Kazuhisa, Sasaki, Toshiyuki, Sakai, Itsuko, Hayashi, Hisataka
Format:	Article
Language:	English
Citations:	Items that this one cites Items that cite this one
Online Access:	Get full text
Tags:	Add Tag No Tags, Be the first to tag this record!