Monitoring of conditions inside gas aggregation cluster source during production of Ti/TiO x nanoparticles

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Bibliographic Details
Published in:Plasma sources science & technology 2017-09, Vol.26 (10), p.105003
Main Authors: Kousal, J, Kolpaková, A, Shelemin, A, Kudrna, P, Tichý, M, Kylián, O, Hanuš, J, Choukourov, A, Biederman, H
Format: Article
Language:English
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ISSN:1361-6595
1361-6595
DOI:10.1088/1361-6595/aa88e8