Numerical enhancements of the microwave resonant cavity method for plasma diagnostics

Microwave resonator method is a well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater approximation of very small electromagnetic field perturbation is extended and corrected by a more accurate, yet relatively simple numer...

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Bibliographic Details
Published in:Plasma sources science & technology 2019-10, Vol.28 (10), p.105007
Main Authors: Faltýnek, J, Kudrle, V, Tesař, J, Volfová, M, Tálský, A
Format: Article
Language:English
Subjects:
discharge profile
microwave
mode stability
numerical model
plasma density
plasma diagnostics
resonator
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Summary:Microwave resonator method is a well established and sensitive technique of plasma density measurements, especially in low pressure plasmas. The traditional Slater approximation of very small electromagnetic field perturbation is extended and corrected by a more accurate, yet relatively simple numerical model, also addressing further phenomena such as the resonator eigenmodes and the stability of the dominant mode. The presence of a discharge tube is found to be a main source of deviation from the Slater approximation. The pre-calculated numerical correction factors are directly applicable for a range of cavity and discharge tube geometries.
ISSN:0963-0252
1361-6595
1361-6595
DOI:10.1088/1361-6595/ab4300