Performance of tantalum as plasma electrode material in negative hydrogen ion sources

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Bibliographic Details
Published in:Plasma sources science & technology 2021-07, Vol.30 (7), p.75014
Main Authors: Bacal, M, Maeshiro, K, Masaki, S, Wada, M
Format: Article
Language:English
Subjects:
negative hydrogen ion
plasma electrode
tantalum
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ISSN:0963-0252
1361-6595
DOI:10.1088/1361-6595/abfbc8