Electric signals measured during plasma thin-film etching and their connection to the electron concentration and the properties of the treated surface

The electric characteristics of a discharge are usually changed when a thin film is deposited on or etched from a discharge electrode or a substrate. The electric characteristics include the plasma potential, discharge voltage and discharge current, including higher harmonic frequencies of these qua...

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Bibliographic Details
Published in:Plasma sources science & technology 2022-03, Vol.31 (3), p.35021
Main Authors: Dvořák, P, Žemlička, R, Přibyl, R, Buršíková, V
Format: Article
Language:English
Subjects:
capacitively coupled discharges
diamond-like carbon films
electron concentration
etching
higher harmonic frequencies
plasma
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Summary:The electric characteristics of a discharge are usually changed when a thin film is deposited on or etched from a discharge electrode or a substrate. The electric characteristics include the plasma potential, discharge voltage and discharge current, including higher harmonic frequencies of these quantities. This fact can be used for the monitoring of various plasma processes, but the mechanism by which the thin film influences the electric characteristics of the discharge has not been fully clarified. Our study of diamond-like carbon (DLC) film etching verified that variations of electric discharge parameters are caused by variations of electron concentration, which is caused by a difference in the electron emission yield between the DLC film and its substrate.
ISSN:0963-0252
1361-6595
DOI:10.1088/1361-6595/ac4e23