The study of radiation effects in emerging micro and nano electro mechanical systems (M and NEMs)

The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferr...

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Bibliographic Details
Published in:Semiconductor science and technology 2017-01, Vol.32 (1), p.13005
Main Authors: Arutt, Charles N, Alles, Michael L, Liao, Wenjun, Gong, Huiqi, Davidson, Jim L, Schrimpf, Ronald D, Reed, Robert A, Weller, Robert A, Bolotin, Kirill, Nicholl, Ryan, Pham, Thang Toan, Zettl, Alex, Qingyang, Du, Hu, Juejun, Li, Mo, Alphenaar, Bruce W, Lin, Ji-Tzuoh, Shurva, Pranoy Deb, McNamara, Shamus, Walsh, Kevin M, Feng, Philip X-L, Hutin, Louis, Ernst, Thomas, Homeijer, Brian D, Polcawich, Ronald G, Proie, Robert M, Jones, Jacob L, Glaser, Evan R, Cress, Cory D, Bassiri-Gharb, Nazanin
Format: Article
Language:English
Subjects:
2D materials
MEMS
micromachined cantilevers
NEMS
radiation effects
silicon carbide (SiC)
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Summary:The potential of micro and nano electromechanical systems (M and NEMS) has expanded due to advances in materials and fabrication processes. A wide variety of materials are now being pursued and deployed for M and NEMS including silicon carbide (SiC), III-V materials, thin-film piezoelectric and ferroelectric, electro-optical and 2D atomic crystals such as graphene, hexagonal boron nitride (h-BN), and molybdenum disulfide (MoS2). The miniaturization, functionality and low-power operation offered by these types of devices are attractive for many application areas including physical sciences, medical, space and military uses, where exposure to radiation is a reliability consideration. Understanding the impact of radiation on these materials and devices is necessary for applications in radiation environments.
ISSN:0268-1242
1361-6641
DOI:10.1088/1361-6641/32/1/013005