Combined STEM-EDS tomography of nanowire structures

The 3D spatial resolution, the material contrast and the evolution of the noise are analyzed in the reconstructed volume of a combined scanning transmission electron microscopy (HAADF-STEM) and energy dispersive x-ray spectroscopy (EDS) tomography experiment. Standard simultaneous iterative reconstr...

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Bibliographic Details
Published in:Semiconductor science and technology 2019-11, Vol.34 (11), p.114002
Main Authors: Bender, Hugo, Richard, Olivier, Kundu, Paromita, Favia, Paola, Zhong, Zhichao, Palenstijn, Willem Jan, Batenburg, Kees Joost, Wirix, Maarten, Kohr, Holger, Schoenmakers, Remco
Format: Article
Language:English
Subjects:
EDS tomography
HEBT tomography reconstruction
nanowire device
pillar tomography sample
STEM tomography
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Summary:The 3D spatial resolution, the material contrast and the evolution of the noise are analyzed in the reconstructed volume of a combined scanning transmission electron microscopy (HAADF-STEM) and energy dispersive x-ray spectroscopy (EDS) tomography experiment. Standard simultaneous iterative reconstruction technique and HAADF-EDS bimodal tomographic reconstruction are considered for the +/−90° tomography series of a pillar shaped sample embedding a full nanowire device. With a high number of iterations, a spatial resolution for both HAADF and EDS down to 5 nanometer can be reached for this volume. Best material's contrast and minimum noise are obtained for medium number of iterations. Improvement of the signal-to-noise and contrast can be obtained by filtering the EDS data while the spatial resolution is not impacted. A fast and reliable preparation methodology for rectangularly shaped pillar samples for tomography analysis is discussed.
ISSN:0268-1242
1361-6641
DOI:10.1088/1361-6641/ab4840