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Gallium nitride films of high n-type conductivity grown by reactive sputtering

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Bibliographic Details
Published in:Semiconductor science and technology 2020-04, Vol.35 (4), p.45011
Main Authors: Monish, M, Mohan, Shyam, Sutar, D S, Major, S S
Format: Article
Language:English
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ISSN:0268-1242
1361-6641
DOI:10.1088/1361-6641/ab73ec