Investigations on epitaxy and lattice distortion of sputter deposited β-Ga 2 O 3 layers on GaN templates

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Bibliographic Details
Published in:Semiconductor science and technology 2020-08, Vol.35 (8), p.85024
Main Authors: Ghosh, Sahadeb, Srivastava, Himanshu, Rao, P N, Nand, Mangla, Tiwari, Pragya, Srivastava, A K, Jha, S N, Rai, S K, Singh, S D, Ganguli, Tapas
Format: Article
Language:English
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ISSN:0268-1242
1361-6641
DOI:10.1088/1361-6641/ab9326