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A novel circular double-gate SOI MOSFET with raised source/drain
In this paper, we report the performance of a novel circular double-gate (CDGT) silicon-on-insulator metal oxide semiconductor field effect transistor (MOSFET). We explore a variety of device configurations that are possible by making changes in the pad height in terms of a raised top, bottom, or to...
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Published in: | Semiconductor science and technology 2021-06, Vol.36 (6), p.65009 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | In this paper, we report the performance of a novel circular double-gate (CDGT) silicon-on-insulator metal oxide semiconductor field effect transistor (MOSFET). We explore a variety of device configurations that are possible by making changes in the pad height in terms of a raised top, bottom, or top and bottom (both). The results demonstrate that the best device configuration is a raised both CDGT with an internal pad as a drain. For the above configuration, the impact of a junctionless mode is further analyzed and the optimum performance is obtained with a doping level of 1 × 10
18
cm
−3
. The device exhibits good electrical characteristics, with an ON/OFF current ratio of 3.73 × 10
5
, a near-ideal subthreshold slope of 66.9 mV dec
−1
, and a small drain-induced barrier lowering of ∼35 mV V
−1
. Among various circular MOSFETs, the CDGT device exhibits an optimum delay performance of 2 ps based on a two-stage inverter analysis. |
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ISSN: | 0268-1242 1361-6641 |
DOI: | 10.1088/1361-6641/abf0e6 |