Development of multi-step processing in silicon-on-insulator for optical waveguide applications

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Bibliographic Details
Published in:Journal of optics. A, Pure and applied optics Pure and applied optics, 2006-07, Vol.8 (7), p.S455-S460
Main Authors: Solehmainen, K, Aalto, T, Dekker, J, Kapulainen, M, Harjanne, M, Heimala, P
Format: Article
Language:English
Subjects:
Applied sciences
Circuit properties
Electric, optical and optoelectronic circuits
Electronics
Exact sciences and technology
Integrated optics. Optical fibers and wave guides
Optical and optoelectronic circuits
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ISSN:1464-4258
1741-3567
DOI:10.1088/1464-4258/8/7/S22