Mid-infrared materials and devices on a Si platform for optical sensing

In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiN x...

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Bibliographic Details
Published in:Science and technology of advanced materials 2014-02, Vol.15 (1), p.014603-15
Main Authors: Singh, Vivek, Lin, Pao Tai, Patel, Neil, Lin, Hongtao, Li, Lan, Zou, Yi, Deng, Fei, Ni, Chaoying, Hu, Juejun, Giammarco, James, Soliani, Anna Paola, Zdyrko, Bogdan, Luzinov, Igor, Novak, Spencer, Novak, Jackie, Wachtel, Peter, Danto, Sylvain, Musgraves, J David, Richardson, Kathleen, Kimerling, Lionel C, Agarwal, Anuradha M
Format: Article
Language:English
Subjects:
Broadband
Chalcogenides
Detection
Detectors
Devices
Directional couplers
Focus on Silicon Photonics
Lab-on-a-chip
Lead tellurides
MATERIALS SCIENCE
Mid-infrared
Photodetectors
Photonic crystals
Platforms
Polymer enrichment layers
Resonators
Selectivity
Sensitivity enhancement
Sensors
Silicon
Waveguides
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Summary:In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiN x waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.
ISSN:1468-6996
1878-5514
DOI:10.1088/1468-6996/15/1/014603