Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference

A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to dif...

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Bibliographic Details
Published in:Chinese physics B 2017-05, Vol.26 (5), p.148-152
Main Author: 陈宜臻 王向贤 王茹 杨华 祁云平
Format: Article
Language:English
Subjects:
光场分布
光学结构
制作
双光束干涉
坐标变换
旋转样品
激光干涉
矩阵表示
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Summary:A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures.
ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/26/5/054203