PEALD-deposited crystalline GaN films on Si (100) substrates with sharp interfaces

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Bibliographic Details
Published in:Chinese physics B 2019-02, Vol.28 (2), p.26801
Main Authors: Liu, San-Jie, He, Ying-Feng, Wei, Hui-Yun, Qiu, Peng, Song, Yi-Meng, An, Yun-Lai, Rehman, Abdul, Peng, Ming-Zeng, Zheng, Xin-He
Format: Article
Language:English
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ISSN:1674-1056
2058-3834
DOI:10.1088/1674-1056/28/2/026801