Design and characterization of a multi-ring nested CMUT array for hydrophone

This paper presents the design, fabrication, packaging, and characterization of a high-performance CMUT array. The array, which features rectangular cells fabricated using a sacrificial release process, achieves a receiving sensitivity of −231.44 dB (re: 1 V/ μ Pa) with a 40 dB gain. Notably, the CM...

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Bibliographic Details
Published in:Journal of semiconductors 2024-11, Vol.45 (11), p.112301
Main Authors: Jia, Licheng, Xue, Rihui, Meng, Fansheng
Format: Article
Language:English
Subjects:
cmut array
mirco-electro-mechanical systems (mems)
non-linearity
receiving sensitivity
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Summary:This paper presents the design, fabrication, packaging, and characterization of a high-performance CMUT array. The array, which features rectangular cells fabricated using a sacrificial release process, achieves a receiving sensitivity of −231.44 dB (re: 1 V/ μ Pa) with a 40 dB gain. Notably, the CMUT array exhibits a minimal sensitivity variation of just 0.87 dB across a temperature range of 0 to 60 °C. Furthermore, the output voltage non-linearity at 1 kHz is approximately 0.44%. These test results demonstrate that the reception performance of the 67-element CMUT array is superior to that of commercial transducers. The high performance and compact design of this CMUT array underscore its significant commercial potential for hydrophone applications.
ISSN:1674-4926
2058-6140
DOI:10.1088/1674-4926/24060007