Improved spectral characteristics of 980 nm broad area slotted Fabry-Perot diode lasers

A novel broad area slotted Fabry-Perot diode laser is designed and fabricated. Using a new semi- analytical method, we introduce effective refractive index perturbations in the form of etched slot features into a conventional 980 nm broad area Fabry-Perot cavity, and the spectral characteristics of...

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Bibliographic Details
Published in:Journal of semiconductors 2012, Vol.33 (1), p.68-71
Main Author: 高卓 王俊 熊聪 刘媛媛 刘素平 马骁宇
Format: Article
Language:English
Subjects:
Density
Devices
Diode lasers
Etching
Fabry-Perot
Semiconductors
Spectra
Spectral emissivity
光谱特征
光谱特性
开槽法
折射率扰动
激光二极管
激光器结构
电感耦合等离子体
纳米
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Summary:A novel broad area slotted Fabry-Perot diode laser is designed and fabricated. Using a new semi- analytical method, we introduce effective refractive index perturbations in the form of etched slot features into a conventional 980 nm broad area Fabry-Perot cavity, and the spectral characteristics of the device are expected to be noticeably improved. A low density of slot features is formed by using standard optical lithography and inductively coupled plasma dry etching. The experimental results show that the full spectral width at half-maximum is less than 0.4 rim, meanwhile, the thermal shift of the emission spectrum is decreased from 0.26 to 0.07 nm/℃ over a temperature range of 10 to 60℃. The improved spectral characteristics of the device are proved to be attributed to such slotted Fabry-Perot laser structures.
ISSN:1674-4926
DOI:10.1088/1674-4926/33/1/014007