A low noise interface circuit design of micro-machined gyroscope

The analyses of MEMS gyroscope interface circuit on thermal noise, 1/f noise and phase noise are made in this paper. A closed-loop differential driving circuit and a low-noise differential detecting circuit based on the high frequency modulation are designed to limit the noise. The interface chip is...

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Bibliographic Details
Published in:Journal of semiconductors 2017-07, Vol.38 (7), p.121-124
Main Authors: Fu, Qiang, Di, Xipeng, Yin, Liang, Liu, Xiaowei
Format: Article
Language:English
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Summary:The analyses of MEMS gyroscope interface circuit on thermal noise, 1/f noise and phase noise are made in this paper. A closed-loop differential driving circuit and a low-noise differential detecting circuit based on the high frequency modulation are designed to limit the noise. The interface chip is implemented in a standard0.5 μm CMOS process. The test results show that the resolution of sensitive capacity can reach to 6.47×10-20 F at the bandwidth of 60 Hz. The measuring range is ± 200°/s and the nonlinearity is 310 ppm. The output noise density is 5.8°/(h·（Hz）1/2). The angular random walk（allen-variance） is 0.092°/h1/2 and the bias instability is 2.63°/h.
ISSN:1674-4926
DOI:10.1088/1674-4926/38/7/075005