Fabrication and evaluation of a thermal sensor formed on a thin photosensitive epoxy membrane with low thermal conductivity

This article present the fabrication and development of a thin metal film bolometer IR detector connected in a Wheatstone bridge configuration. The bolometer is constructed on a 4 μm thin self-supported SU-8 2002 membrane. A polymer material such as SU-8 has low thermal conductivity and is applied u...

Full description

Saved in:
Bibliographic Details
Published in:Journal of physics. Conference series 2008-03, Vol.100 (8), p.082048, Article 082048
Main Authors: Mattsson, C G, Thungström, G, Bertilsson, K, Nilsson, H-E, Martin, H
Format: Article
Language:English
Subjects:
Bolometers
Heat conductivity
Heat transfer
Materials selection
Membranes
Photolithography
Photosensitivity
Physics
Production costs
Sensitivity
Silicon nitride
Thermal conductivity
Thermal simulation
Wheatstone bridges
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This article present the fabrication and development of a thin metal film bolometer IR detector connected in a Wheatstone bridge configuration. The bolometer is constructed on a 4 μm thin self-supported SU-8 2002 membrane. A polymer material such as SU-8 has low thermal conductivity and is applied using standard photolithographic processing step, and this could increase detector sensitivity and lower the production cost. Thermal simulation results are presented, which verifies SU-8 as a better choice of materials compared to common membrane materials such as Si and Silicon nitride. Measurements on the fabricated nickel resistance bolometer on SU-8 2002 membrane show a sensitivity of 9.3 V/W when radiated by an IR laser with a wavelength of 1.56 μm.
ISSN:1742-6596
1742-6588
1742-6596
DOI:10.1088/1742-6596/100/8/082048