Effective sputtering yields of alloys chromel and kopel with argon ions in magnetron sputtering system

This article presents the results of research on sputtering of thermoelectric alloys chromel and kopel. Sputtering was performed in argon atmosphere with magnetron sputtering system. Results of this work can be used in creation of thin-film thermoelectric generators.

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Bibliographic Details
Published in:Journal of physics. Conference series 2019-09, Vol.1313 (1), p.12015
Main Authors: Dukhopelnikov, D V, Riazanov, V A, Plotnikova, O P
Format: Article
Language:English
Subjects:
Argon ions
Magnetron sputtering
Photovoltaic cells
Physics
Thermoelectric generators
Thermoelectric materials
Thermoelectricity
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Description
Summary:This article presents the results of research on sputtering of thermoelectric alloys chromel and kopel. Sputtering was performed in argon atmosphere with magnetron sputtering system. Results of this work can be used in creation of thin-film thermoelectric generators.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1313/1/012015