Spectral measurements in the plasma of microwave and magnetron discharges

Spectroscopic methods were used to study the parameters of a low-power (≤ 100 W) magnetron discharge plasma, as well as a low-pressure microwave discharge (6-40 Pa) in argon. It is shown that in the magnetron discharge the concentration of atoms and ions of the buffer gas (Ar) and the target materia...

Full description

Saved in:
Bibliographic Details
Published in:Journal of physics. Conference series 2019-11, Vol.1393 (1), p.12056
Main Authors: Shipilova, O I, Chernikh, A A, Paperny, V L
Format: Article
Language:English
Subjects:
Argon
Cathodes
Electron energy
Line spectra
Low pressure
Microwave discharge
Physics
Plasma
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Spectroscopic methods were used to study the parameters of a low-power (≤ 100 W) magnetron discharge plasma, as well as a low-pressure microwave discharge (6-40 Pa) in argon. It is shown that in the magnetron discharge the concentration of atoms and ions of the buffer gas (Ar) and the target material (Cu) decreases exponentially with distance from the target cathode and in the first case it occurs much more sharply. The temperature of electrons in a plasma stream, which is emitted by a discharge burning near the surface of the cathode, was estimated from the relative intensity of the spectral lines according to the LTE model and the coronal model. The values obtained in both cases were close, lying near 1 eV, and the temperature remained almost constant with the distance from the cathode. The electron temperature in the microwave discharge turned out to be almost constant over the cross section of the plasma column, while the concentration near the microwave emitter was 2-3 times higher than in the rest of the column.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1393/1/012056