Atomic layer deposition ZnO on porous Al 2 O 3 nanofibers film

• Published in: Journal of physics. Conference series 2020-11, Vol.1679 (2), p.22072
• Main Authors: Voronin, A S, Masiygin, A N, Molokeev, M S, Khartov, S V
• Format: Article
• Language: English
• ISSN: 1742-6588; 1742-6596
• DOI: 10.1088/1742-6596/1679/2/022072

The paper presents the results of the formation and study of the morphological and structural characteristics of the mesoporous ZnO / Al 2 O 3 nanofibers film (ZANF). The deposition of a ZnO layer on Al 2 O 3 nanofibers film (ANF) ∼ 1 µm thick was carried out by the method of atomic layer deposition. The morphology of the mesoporous composite layer ZnO / Al 2 O 3 (ZANF) has been studied by scanning and transmission electron microscopy. It is shown that in the process of atomic layer deposition, the ZnO layer grows according to the Stranski-Krastanov mechanism. A ZnO layer less than 5 nm thick gives an island structure in which Al 2 O 3 nanofibers are uniformly coated with ZnO particles, an increase in the ZnO layer thickness to 15 nm demonstrates a continuous coating of Al 2 O 3 nanofibers. The system has a core-shell structure. The resulting composite structures are promising for applications in photocatalysis and gas sensing.