Effect of bias voltage on texture formation in TiN, ZrN, Ta, Nb and W coatings

The effect of the reference voltage on the texture in TiN, ZrN, Nb, Ta and W coatings obtained by PVD methods was investigated by X-ray method. It is shown that an increase in the reference voltage leads to an increase in the {111} texture to a weakening of this texture in W coatings. The results we...

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Bibliographic Details
Published in:Journal of physics. Conference series 2020-12, Vol.1713 (1), p.12010
Main Authors: Betsofen, S Ya, Petrov, L M, Lozovan, A A, Lenkovets, A S, Grushin, I A, Lebedev, M A
Format: Article
Language:English
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Summary:The effect of the reference voltage on the texture in TiN, ZrN, Nb, Ta and W coatings obtained by PVD methods was investigated by X-ray method. It is shown that an increase in the reference voltage leads to an increase in the {111} texture to a weakening of this texture in W coatings. The results were interpreted on the basis of the features of elastic anisotropy in the material of coatings with a cubic lattice.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/1713/1/012010