The influence of multilayer architecture on the structure and mechanical properties of WN x /TiSiN coatings in comparison with WN x and TiSiN single layers

• Published in: Journal of physics. Conference series 2022-12, Vol.2413 (1), p.12013
• Main Authors: Sahul, M, Bočáková, B, Smyrnova, K, Haršáni, M, Truchlý, M, Kusý, M, Pogrebnjak, A, Čaplovič, Ľ, Vopát, T
• Format: Article
• Language: English
• ISSN: 1742-6588; 1742-6596
• DOI: 10.1088/1742-6596/2413/1/012013

The present work deals with the comparison of selected properties of WN x /TiSiN multilayer and respective WN x and TiSiN monolithic coatings that were deposited at the same parameters. The effect of the multilayer architecture on the structure and mechanical properties of WN x /TiSiN multilayer was studied in detail. The multilayers and monolayers were fabricated on high-speed steel substrates by unbalanced direct magnetron sputtering from W (purity 99.95 %) and Ti 80 Si 20 (purity 99.50 %) targets. The chemical composition and the cross-sectional morphology of multilayer and single-layer coatings were characterized by scanning electron microscopy (SEM) equipped with wave-dispersive X-ray spectroscopy (WDS). The structure was analyzed by X-ray diffraction (XRD). The hardness and Young’s modulus of multilayer and coatings were investigated using the nanoindentation method. Results showed that the WN x /TiSiN multilayer, possessing cubic W and TiN phases and a dense layered microstructure, showed slightly improved hardness (28.5 ± 3.5 GPa) and H IT /E IT parameter (0.087), as compared with the WN x and TiSiN coatings. It has been shown that the design of multilayered structure of WN x /TiSiN coating is a promising way to tailor the microstructure and properties of the hard coatings.