Effect of different top electrodes on dielectric properties of Pb 0.3 Sr 0.7 TiO 3 thin film

The PST thin films with different top electrodes were prepared by magnetron sputtering and Sol-gel, respectively. The effects of different top electrodes on Dielectric and Tunable Properties of the films were studied. It is found that the comprehensive properties of the PST films can be improved by...

Full description

Saved in:
Bibliographic Details
Published in:Journal of physics. Conference series 2023-01, Vol.2419 (1), p.12028
Main Authors: Hou, Shuang, Li, Xiuneng, Gu, Zhehan, Xu, Liang, Liu, Kai, Mao, Xueyin, Jian, Hongwei, Yuan, Qiaoqiao
Format: Article
Language:English
Citations: Items that this one cites
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The PST thin films with different top electrodes were prepared by magnetron sputtering and Sol-gel, respectively. The effects of different top electrodes on Dielectric and Tunable Properties of the films were studied. It is found that the comprehensive properties of the PST films can be improved by using suitable top electrodes. When the dielectric tuning amount of PST thin films using Au/Cr dielectric tuning value is 71.4%, the dielectric loss is 0.02004, and the figure of merit (FOM) is 35.7, which has optimal dielectric properties. At the same time, the purpose of replacing precious metals (Au) with cheap metals (Cu) is realized.
ISSN:1742-6588
1742-6596
DOI:10.1088/1742-6596/2419/1/012028